Optical MEMS for chemical analysis and biomedicine

Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others. This boo...

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Bibliographic Details
Other Authors Jiang, Hongrui (Editor)
Format Electronic eBook
LanguageEnglish
Published London, United Kingdom : The Institution of Engineering and Technology, 2016.
SeriesMaterials, circuits and devices series ; 25.
Subjects
Online AccessFull text
ISBN9781849198981
1849198985
9781523103614
1523103612
9781849198974
1849198977
Physical Description1 online resource (xv, 448 pages) : illustrations.

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Table of Contents:
  • Preface; 1. Introduction; 2. Fabrication and manufacturing technology for optical MEMS; 3. Electrothermally actuated MEMS scanning micromirrors and their applications in endoscopic optical coherence tomography imaging; 4. Electrowetting-based microoptics; 5. Microcameras; 6. Biologically inspired optical surfaces for miniaturized optical systems; 7. Tuning nanophotonic cavities with nanoelectromechanical systems; 8. Quantum dot nanophotonics: micropatterned excitation, microarray imaging, and hyperspectral microscopy; 9. Photothermal microfluidics.
  • 10. Optical manipulation for biomedical applications11. Polymer-based optofluidic lenses; 12. Nanostructured aluminum oxide-based optical biosensing and imaging; Index.