Introduction to semiconductor manufacturing technology

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...

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Bibliographic Details
Main Author Xiao, Hong, 1961-
Corporate Author Society of Photo-Optical Instrumentation Engineers
Format Electronic eBook
LanguageEnglish
Published Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE Press, [2012]
EditionSecond edition.
SeriesSPIE monograph ; PM220.
Subjects
Integrated circuits > Design and construction.
Semiconductors > Design and construction.
Semiconductor industry.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780819490933
0819490938
9781628701043
1628701048
9780819490926
081949092X
Physical Description1 online resource (xix, 656 pages) : illustrations

Cover

Table of Contents:
  • Preface to the first edition
  • Preface to the second edition
  • Chapter 1. Introduction
  • Chapter 2. Introduction to integrated circuit fabrication
  • Chapter 3. Semiconductor basics
  • Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering
  • Chapter 5. Thermal processes
  • Chapter 6. Photolithography
  • Chapter 7. Plasma basics
  • Chapter 8. Ion implantation
  • Chapter 9. Etch
  • Chapter 10. Chemical vapor deposition and dielectric thin films
  • Chapter 11. Metallization
  • Chapter 12. Chemical mechanical polishing
  • Chapter 13. Process integration
  • Chapter 14. Integrated circuit processing technologies
  • Chapter 15. Future trends and summary.

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