Introduction to semiconductor manufacturing technology
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...
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| Main Author | |
|---|---|
| Corporate Author | |
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE Press,
[2012]
|
| Edition | Second edition. |
| Series | SPIE monograph ;
PM220. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9780819490933 0819490938 9781628701043 1628701048 9780819490926 081949092X |
| Physical Description | 1 online resource (xix, 656 pages) : illustrations |
Cover
| Summary: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations. |
|---|---|
| Item Description: | "SPIE Digital Library."--Website |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9780819490933 0819490938 9781628701043 1628701048 9780819490926 081949092X |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty |
| Physical Description: | 1 online resource (xix, 656 pages) : illustrations |