Substrate surface preparation handbook

• Main Author: Robertson, Max
• Format: Electronic eBook
• Language: English
• Published: Boston : Artech House, 2012.
• Series: Artech House applied photonics series.
• Subjects: Optical materials > Surfaces.; Glass grinding and polishing.; elektronické knihy; electronic books
• ISBN: 9781608072149; 1608072142; 1608072134; 9781608072132; 9781523117598; 1523117591
• Physical Description: 1 online resource (195 pages) : illustrations.

"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidan...

Table of Contents:

• Introduction
• Preparation : before the start
• Lapping
• Polishing
• Specific processes and materials
• Specialized techniques
• Surface finish
• Optics
• Semiconductor device Deconstruction
• Metallurgical Polishing and Microscopy
• Laboratory Setup
• Using Interferometry.