Fabrication engineering at the micro and nanoscale
Saved in:
Main Author: | |
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Format: | eBook |
Language: | English |
Published: |
New York :
Oxford University Press,
2008.
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Edition: | 3rd ed. |
Series: | Oxford series in electrical and computer engineering.
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Subjects: | |
ISBN: | 9781613441107 161344110X 9780195320176 0195320174 |
Physical Description: | 1 online resource (xiv, 647 pages) : illustrations |
LEADER | 03021cam a2200457 a 4500 | ||
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001 | kn-ocn743217551 | ||
003 | OCoLC | ||
005 | 20240717213016.0 | ||
006 | m o d | ||
007 | cr cn||||||||| | ||
008 | 110728s2008 nyua ob 001 0 eng d | ||
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020 | |a 9781613441107 |q (electronic bk.) | ||
020 | |a 161344110X |q (electronic bk.) | ||
020 | |a 9780195320176 |q (pbk. ; |q alk. paper) | ||
020 | |a 0195320174 |q (pbk. ; |q alk. paper) | ||
024 | 8 | |a 99938605354 | |
035 | |a (OCoLC)743217551 |z (OCoLC)748339450 |z (OCoLC)858447343 |z (OCoLC)961884888 |z (OCoLC)988635253 |z (OCoLC)999445003 |z (OCoLC)1058076207 |z (OCoLC)1065708099 | ||
100 | 1 | |a Campbell, Stephen A., |d 1954- |1 https://id.oclc.org/worldcat/entity/E39PCjtDFKkpbB3b4gQPmjTPwC | |
245 | 1 | 0 | |a Fabrication engineering at the micro and nanoscale / |c Stephen A. Campbell. |
250 | |a 3rd ed. | ||
260 | |a New York : |b Oxford University Press, |c 2008. | ||
300 | |a 1 online resource (xiv, 647 pages) : |b illustrations | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a computer |b c |2 rdamedia | ||
338 | |a online resource |b cr |2 rdacarrier | ||
490 | 1 | |a The Oxford series in electrical and computer engineering | |
504 | |a Includes bibliographical references and index. | ||
505 | 0 | |a An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing. | |
506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty | ||
590 | |a Knovel |b Knovel (All titles) | ||
650 | 0 | |a Semiconductors |x Design and construction. | |
650 | 0 | |a Semiconductors |x Mathematical models. | |
650 | 0 | |a Microelectronics. | |
650 | 0 | |a Nanoelectronics. | |
655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
655 | 9 | |a electronic books |2 eczenas | |
700 | 1 | |a Campbell, Stephen A., |d 1954- |t Science and engineering of microelectronic fabrication. | |
776 | 0 | 8 | |i Print version: |a Campbell, Stephen A., 1954- |t Fabrication engineering at the micro and nanoscale. |b 3rd ed. |d New York : Oxford University Press, 2008 |z 0195320174 |w (DLC) 2007013450 |w (OCoLC)122338108 |
830 | 0 | |a Oxford series in electrical and computer engineering. | |
856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpFEMNE001/fabrication-engineering-at?kpromoter=marc |y Full text |