Developments in surface contamination and cleaning : particle deposition, control and removal

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Bibliographic Details
Other Authors Kohli, Rajiv, 1947-, Mittal, K. L., 1945-
Format Electronic eBook
LanguageEnglish
Published Amsterdam ; Boston : Elsevier/William Andrew, ©2010.
Subjects
Surfaces (Technology)
Surface contamination > Prevention.
Particles > Measurement.
Cleaning.
Coatings.
Dust control.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781437778311
1437778313
9781437778304
1437778305
Physical Description1 online resource (xv, 286 pages, 8 pages of plates) : illustrations (some color)

Cover

TOC from ObalkyKnih.cz
Table of Contents:
  • Particle Deposition onto Enclosure Surfaces; Contamination Control: A Systems Approach; Particles in Semiconductor Processing; Continuous Contamination Monitoring Systems; Strippable Coatings for Removal of Surface Contaminants; Ultrasonic Cleaning.
  • [V. 1.] Fundamentals and applied aspects
  • v. 2. Particle deposition, control and removal.

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