Microfabrication for microfluidics

Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the...

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Bibliographic Details
Main Authors Lee, Sang-Joon John (Author), Sundararajan, Narayanan (Author)
Format Electronic eBook
LanguageEnglish
Published Boston : Artech House, 2010.
SeriesArtech House integrated microsystems series.
Subjects
Microfluidics.
Microfabrication.
Microfluidic devices.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781596934726
1596934727
9781523117413
1523117419
9781596934719
1596934719
Physical Description1 online resource (xii, 262 pages) : illustrations

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Table of Contents:
  • Microfabrication for Microfluidics; Contents; Preface; Chapter 1 Introduction; Chapter 2 Geometric Features; Chapter 3 Materials for Microfluidic Devices; Chapter 4 Photolithography; Chapter 5 Solidification Processes and Soft Lithography; Chapter 6 Subtractive Processes; Chapter 7 Additive Processes; Chapter 8 Fugitive and Sacrificial Release Processes; Chapter 9 Substrate Bonding and Fluidic Interfacing; Chapter 10 Functional Domains and System Integration; List of Acronyms and Abbreviations; About the Authors; Index.

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