Nanolithography and patterning techniques in microelectronics
Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...
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| Other Authors | |
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| Format | Electronic eBook |
| Language | English |
| Published |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
©2005.
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| Series | Woodhead Publishing in materials.
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| Subjects | |
| Online Access | Full text |
| ISBN | 9781615831869 161583186X 9781855739314 1855739313 1845690907 9781845690908 0849334470 9780849334474 128056833X 9781280568336 9786610568338 6610568332 |
| Physical Description | 1 online resource (xiv, 409 pages) : illustrations. |
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| Summary: | Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781615831869 161583186X 9781855739314 1855739313 1845690907 9781845690908 0849334470 9780849334474 128056833X 9781280568336 9786610568338 6610568332 |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty |
| Physical Description: | 1 online resource (xiv, 409 pages) : illustrations. |