Nanofabrication : fundamentals and applications

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is v...

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Bibliographic Details
Other Authors Tseng, A. A.
Format Electronic eBook
LanguageEnglish
Published Singapore ; Hackensack, NJ : World Scientific, ©2008.
Subjects
Nanostructured materials.
Nanostructures.
Scanning probe microscopy.
Lithography, Electron beam.
elektronické knihy
electronic books
Online AccessFull text
ISBN9789812790897
9812790896
9781613447789
1613447787
1281933597
9781281933591
9789812700766
9812700765
9789812705426
9812705422
Physical Description1 online resource (viii, 574 pages) : illustrations (some color)

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Table of Contents:
  • Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng [and others]
  • ch. 2. Atomic force microscope lithography / N. Kawasegi [and others]
  • ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi [and others]
  • ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz
  • ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin
  • ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias
  • ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur
  • ch. 8. Extreme ultraviolet lithography / H. Kinoshita
  • ch. 9. Electron projection lithography / T. Miura [and others]
  • ch. 10. Electron beam direct writing / K. Yamazaki
  • ch. 11. Electron beam induced deposition / K. Mitsuishi
  • ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen
  • ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi
  • ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni
  • ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei
  • ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger.

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