Nanofabrication : fundamentals and applications

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is v...

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Bibliographic Details
Other Authors: Tseng, A. A.
Format: eBook
Language: English
Published: Singapore ; Hackensack, NJ : World Scientific, ©2008.
Subjects:
Nanostructured materials.
Nanostructures.
Scanning probe microscopy.
Lithography, Electron beam.
elektronické knihy
electronic books
ISBN: 9789812790897
9812790896
9781613447789
1613447787
1281933597
9781281933591
9789812700766
9812700765
9789812705426
9812705422
Physical Description: 1 online resource (viii, 574 pages) : illustrations (some color)

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Table of contents

LEADER 05214cam a2200493Ma 4500
001 kn-ocn463076470
003 OCoLC
005 20240717213016.0
006 m o d
007 cr cn|||||||||
008 070919s2008 si a ob 001 0 eng
040 |a AU@  |b eng  |e pn  |c AU@  |d N$T  |d YDXCP  |d OCLCQ  |d CDX  |d IDEBK  |d OCLCQ  |d LGG  |d STF  |d OCLCQ  |d B24X7  |d OCLCQ  |d KNOVL  |d DEBSZ  |d OCLCQ  |d OCLCO  |d KNOVL  |d EBLCP  |d OCLCQ  |d E7B  |d UBY  |d UKMGB  |d OCLCF  |d OCLCQ  |d PHADU  |d AGLDB  |d OCLCQ  |d VNS  |d OCLCQ  |d VTS  |d JBG  |d OCLCQ  |d AU@  |d M8D  |d OCLCQ  |d K6U  |d LEAUB  |d OCLCO  |d OCLCQ  |d OCLCO  |d OCLCL 
020 |a 9789812790897  |q (electronic bk.) 
020 |a 9812790896  |q (electronic bk.) 
020 |a 9781613447789  |q (electronic bk.) 
020 |a 1613447787  |q (electronic bk.) 
020 |a 1281933597 
020 |a 9781281933591 
020 |z 9789812700766 
020 |z 9812700765 
020 |z 9789812705426 
020 |z 9812705422 
024 8 |a 99955267324 
035 |a (OCoLC)463076470  |z (OCoLC)262623243  |z (OCoLC)313650714  |z (OCoLC)505148210  |z (OCoLC)646768831  |z (OCoLC)652399071  |z (OCoLC)712980402  |z (OCoLC)815752165  |z (OCoLC)879074261  |z (OCoLC)953600072  |z (OCoLC)977327385  |z (OCoLC)979247388  |z (OCoLC)980286272  |z (OCoLC)987782847  |z (OCoLC)999658779  |z (OCoLC)1049664167  |z (OCoLC)1058381899  |z (OCoLC)1086411583  |z (OCoLC)1160023935  |z (OCoLC)1181932821 
245 0 0 |a Nanofabrication :  |b fundamentals and applications /  |c editor, Ampere A. Tseng. 
260 |a Singapore ;  |a Hackensack, NJ :  |b World Scientific,  |c ©2008. 
300 |a 1 online resource (viii, 574 pages) :  |b illustrations (some color) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
505 0 |a Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng [and others] -- ch. 2. Atomic force microscope lithography / N. Kawasegi [and others] -- ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi [and others] -- ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz -- ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin -- ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias -- ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur -- ch. 8. Extreme ultraviolet lithography / H. Kinoshita -- ch. 9. Electron projection lithography / T. Miura [and others] -- ch. 10. Electron beam direct writing / K. Yamazaki -- ch. 11. Electron beam induced deposition / K. Mitsuishi -- ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen -- ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi -- ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni -- ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei -- ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger. 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Nanostructured materials. 
650 0 |a Nanostructures. 
650 0 |a Scanning probe microscopy. 
650 0 |a Lithography, Electron beam. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Tseng, A. A.  |q (Ampere A.) 
776 0 8 |i Print version:  |t Nanofabrication.  |d Singapore ; Hackensack, NJ : World Scientific, 2008  |z 9789812700766  |z 9812700765  |w (DLC) 2008275080  |w (OCoLC)173721197 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpNFA0000K/nanofabrication-fundamentals-and?kpromoter=marc  |y Full text 

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