MEMS : a practical guide to design, analysis, and applications

Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for "smaller, better, cheaper, and faster?" If you are a product development engineer or manager, the decision to design a MEMS device implies having a...

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Bibliographic Details
Other Authors Korvink, J. G., Paul, Oliver
Format Electronic eBook
LanguageEnglish
Published Norwich, NY : Heidelberg, Germany : W. Andrew Pub. ; Springer, ©2006.
Subjects
Microelectromechanical systems.
elektronické knihy
electronic books
Online AccessFull text
ISBN0815514972
9780815514978
3540211179
9783540211174
9780815518259
0815518250
9783540336556
3540336559
9780815518280
0815518285
Physical Description1 online resource (xxv, 965 pages) : illustrations

Cover

Table of Contents:
  • Introduction
  • Microtransducer Operation
  • Material Properties: Measurement and Data
  • MEMS and MEMS Simulation
  • System-Level Simulation of Microsystems
  • Thermal Based Sensors
  • Photon Detectors
  • Free-Space Optical MEMS
  • Integrated Micro-Optics
  • Magnetic Microsensors
  • Mechanical Microsensors
  • Semiconductor-Based Chemical Microsensors
  • Microfluidics
  • Biomedical Microsystems
  • Microactuators
  • Micromachining Technology
  • Interface Circuitry and Microsystems
  • Index.

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