Handbook of ellipsometry
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...
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| Other Authors | , |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Norwich, NY : Heidelberg, Germany :
William Andrew Pub. ; Springer,
©2005.
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| Subjects | |
| Online Access | Full text |
| ISBN | 0815514999 9780815514992 3540222936 9783540222934 1591248493 9781591248491 9780815517467 0815517467 |
| Physical Description | 1 online resource (xvi, 870 pages) : illustrations |
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| 020 | |a 1591248493 |q (electronic bk.) | ||
| 020 | |a 9781591248491 |q (electronic bk.) | ||
| 020 | |a 9780815517467 |q (electronic bk.) | ||
| 020 | |a 0815517467 |q (electronic bk.) | ||
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| 042 | |a pcc | ||
| 245 | 0 | 0 | |a Handbook of ellipsometry / |c edited by Harland G. Tompkins and Eugene A. Irene. |
| 260 | |a Norwich, NY : |b William Andrew Pub. ; |a Heidelberg, Germany : |b Springer, |c ©2005. | ||
| 300 | |a 1 online resource (xvi, 870 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a PART 1: THEORY OF ELLIPSOMETRY -- Polarized Light and Ellipsometry -- Optical Physics of Materials -- Data Analysis for Spectroscopic Ellipsometry -- PART 2: INSTRUMENTATION -- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer -- Rotating Polarizer and Analyzer Ellipsometry -- Polarization Modulation Ellipsometry -- Multichannel Ellipsometry -- PART 3: APPLICATIONS -- SiO2 Films -- Theory and Application of Generalized Ellipsometry -- PART 4: EMERGING AREAS -- VUV Ellipsometry -- Spectroscopic Infrared Ellipsometry -- Ellipsometry in Life Sciences -- Index. | |
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty | ||
| 520 | |a The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry. | ||
| 590 | |a Knovel |b Knovel (All titles) | ||
| 650 | 0 | |a Ellipsometry. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Tompkins, Harland G. | |
| 700 | 1 | |a Irene, Eugene A. | |
| 776 | 0 | 8 | |i Print version: |t Handbook of ellipsometry. |d Norwich, NY : William Andrew Pub. ; Heidelberg, Germany : Springer, ©2005 |z 0815514999 |w (DLC) 2004014676 |w (OCoLC)55887386 |
| 856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpHE000001/handbook-of-ellipsometry?kpromoter=marc |y Full text |