Semiconductor safety handbook : safety and health in the semiconductor industry
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in t...
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Westwood, N.J. :
Noyes Publications,
©1998.
|
| Series | Semiconductor safety series.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 1591241510 9781591241515 9780080946542 0080946542 9780815514183 0815514182 |
| Physical Description | 1 online resource (xxiv, 610 pages) : illustrations |
Cover
Table of Contents:
- Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies
- Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention
- Chemical Hazards in Semiconductor Operations
- Industrial Hygiene
- Electrical Hazards
- Radiation Safety
- Recognition, Evaluation and Control of Some Plasma Processing Hazards
- Fire Protection Technology for Semiconductor Operations
- Building and Fire Codes Impacting the Semiconductor Industry
- Gases and Gas Equipment
- Toxic Gas Monitoring
- References
- Index.