rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Semiconductor industrial hygiene handbook
    sub title: monitoring, ventilation, equipment, and ergonomics
  name:
    name part: Williams, Michael E.
    name part: 1949-
    role:
      role term: creator
  name:
    name part: Baldwin, David G.
  name:
    name part: Manz, Paul C.
  type of resource: text
  genre: bibliography
  genre: elektronické knihy
  genre: electronic books
  origin info:
    place:
      place term: nju
    place:
      place term: Park Ridge, N.J., U.S.A
    publisher: Noyes Publications
    date issued: ©1995
    date issued: 1995
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xv, 348 pages) : illustrations
  abstract: This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
  table of contents: Introduction -- Industrial Hygiene Monitoring -- Industrial Hygiene Monitoring: Physical Agents -- Ventilation -- Personal Protective Equipment (PPE) -- Indoor Air Quality (IAQ) -- Ergonomics -- Industrial Hygiene Recordkeeping -- Plan Review -- Appendix A: Silicon Ingot and Wafer Manufacturing -- Appendix B: Silicon Device Manufacturing Introduction -- Appendix C: III-V (GaAs) -- Appendix D: III-V Device: Microwave IC -- Appendix E: Ion Implanter Maintenance Safety Considerations -- Appendix F: Bibliography -- Glossary and Acronyms -- Index.
  note: by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz.
  note: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductor industry
    topic: Employees
    topic: Health and hygiene
  subject:
    topic: Industrial hygiene
  related item:
    title info:
      title: Semiconductor industrial hygiene handbook
    name:
      name part: Williams, Michael E.
    origin info:
      publisher: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995
    identifier: (DLC) 94031248
    identifier: (OCoLC)31044757
  related item:
    title info:
      title: Materials science and process technology series
  identifier: 1591241448
  identifier: 9781591241447
  identifier: 9780815513698
  identifier: 0815513690
  identifier: https://proxy.k.utb.cz/login
  access condition: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty
  record info:
    record content source: KNOVL
    record creation date: 011105
    record change date: 20240717213016.0
    record identifier: kn-ocm49708613
    language of cataloging:
      language term: eng