Handbook of VLSI microlithography : principles, technology, and applications

This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...

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Bibliographic Details
Other Authors Helbert, John N.
Format Electronic eBook
LanguageEnglish
Published Park Ridge, N.J. : Norwich, N.Y. : Noyes Publications ; William Andrew Pub., ©2001.
Edition2nd ed.
SeriesMaterials science and process technology series. Electronic materials and process technology.
Subjects
Integrated circuits > Very large scale integration.
Microlithography.
elektronické knihy
electronic books
Online AccessFull text
ISBN1591242754
9781591242758
9780815517801
0815517807
9786611411763
6611411763
9780815514442
0815514441
Physical Description1 online resource (xxi, 1001 pages) : illustrations

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Table of Contents:
  • Issues and Trends Affecting Lithography Tool Selection Strategy
  • Resist Technology: Design, Processing and Applications
  • Lithography Process Monitoring and Defect Detection
  • Techniques and Tools for Photo Metrology
  • Techniques and Tools for Optical Lithography
  • Microlithography Tool Automation
  • Electron Beam ULSI Applications
  • Rational Vibration and Structural Dynamics for Lithographic Tool Installations
  • Applications of Ion Microbeam Lithography and Direct Processing
  • X-Ray Lithography.

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