Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology

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Bibliographic Details
Other Authors McGuire, G. E.
Format Electronic eBook
LanguageEnglish
Published Park Ridge, N.J. : Noyes Publicatons, ©1988.
SeriesMaterials science and process technology series.
Subjects
Online AccessFull text
ISBN1591242525
9781591242529
9780815518969
081551896X
0815511507
9780815511502
1282027441
9781282027442
9786612027420
6612027428
0815518986
9780815518983
Physical Description1 online resource (xiii, 675 pages) : illustrations

Cover

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245 0 0 |a Semiconductor materials and process technology handbook :  |b for very large scale integration (VLSI) and ultra large scale integration (ULSI) /  |c edited by Gary E. McGuire. 
260 |a Park Ridge, N.J. :  |b Noyes Publicatons,  |c ©1988. 
300 |a 1 online resource (xiii, 675 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
490 1 |a Materials science and process technology series 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology 
504 |a Includes bibliographical references and index. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Integrated circuits  |x Very large scale integration  |x Design and construction  |v Handbooks, manuals, etc. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a McGuire, G. E. 
776 0 8 |i Print version:  |t Semiconductor materials and process technology handbook.  |d Park Ridge, N.J. : Noyes Publicatons, ©1988  |z 0815511507  |w (DLC) 87031529  |w (OCoLC)17200288 
830 0 |a Materials science and process technology series. 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpSMPTH001/semiconductor-materials-and?kpromoter=marc  |y Full text