Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology

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Bibliographic Details
Other Authors McGuire, G. E.
Format Electronic eBook
LanguageEnglish
Published Park Ridge, N.J. : Noyes Publicatons, ©1988.
SeriesMaterials science and process technology series.
Subjects
Online AccessFull text
ISBN1591242525
9781591242529
9780815518969
081551896X
0815511507
9780815511502
1282027441
9781282027442
9786612027420
6612027428
0815518986
9780815518983
Physical Description1 online resource (xiii, 675 pages) : illustrations

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Summary:A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology
Bibliography:Includes bibliographical references and index.
ISBN:1591242525
9781591242529
9780815518969
081551896X
0815511507
9780815511502
1282027441
9781282027442
9786612027420
6612027428
0815518986
9780815518983
Access:Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty
Physical Description:1 online resource (xiii, 675 pages) : illustrations