Handbook of compound semiconductors : growth, processing, characterization, and devices
This book reviews the advances and technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides an overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such...
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| Other Authors | , |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1995.
|
| Series | Materials science and process technology series. Electronic materials and process technology.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9780815517443 0815517440 1591240808 9781591240808 9780080946146 0080946143 1282769286 9781282769281 9786612769283 6612769289 1282002600 9781282002609 9786612002601 6612002603 9780815513742 0815513747 |
| Physical Description | 1 online resource (xxii, 914 pages) : illustrations |
Cover
Table of Contents:
- Bulk Crystal Growth
- MOCVD of Compound Semiconductor Layers
- Molecular Beam Epitaxy
- Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials
- Surface Processing of III-V Semiconductors
- Ion Implantation Induced Extended Defects in GaAs
- Passivation of GaAs and InP
- Wet and Dry Etching of Compound Semiconductors
- Rapid Isothermal Processing (RIP)
- Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices
- Packaging
- Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques
- Characterization of Compound Semiconductor Material by Ion Beams
- Optical Characterization of Compound Semiconductors
- Gallium Arsenide Microelectronic Devices and Circuits
- Optoelectronic Devices
- Acknowledgments
- References
- Index.