Scientific wet process technology for innovative LSI/FPD manufacturing

• Other Authors: Ohmi, Tadahiro (Editor)
• Format: Book
• Language: English
• Published: Boca Raton ; London ; New York : Taylor & Francis Group, CRC Press, 2006
• Subjects: výrobní technologie; výrobní procesy; manufacturing technology; manufacturing processes; wet process; monografie; monographs
• ISBN: 0849335434
• Physical Description: 386 stran : ilustrace ; 25 cm