Developments in surface contamination and cleaning : Particle deposition, control and removal
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Other Authors: | , |
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Format: | Book |
Language: | English |
Published: |
Amsterdam ; Boston ; Heidelberg ; London ; New York ; Oxford ; Paris ; San Diego ; San Francisco ; Singapore ; Sydney ; Tokyo :
Elsevier, WA,
2010
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Subjects: | |
ISBN: | 9781437778304 |
Physical Description: | xv, 286 stran, viii příloh : ilustrace ; 24 cm |
Bibliography: | Obsahuje bibliografie a rejstřík |
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ISBN: | 9781437778304 |