@book{ Solr-81693, title = {Handbook of nanofabrication}, editor = {Wiederrecht, Gary P.}, address = {Amsterdam ; Boston}, publisher = {Elsevier}, year = {2010}, edition = {1st ed.}, pages = {296}, url = {https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpHN00000B/handbook_of_nanofabrication} }