Fundamental principles of engineering nanometrology

The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...

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Bibliographic Details
Main Author Leach, R. K.
Format Electronic eBook
LanguageEnglish
Published Oxford : Amsterdam : William Andrew ; Elsevier Science, ©2010.
Edition1st ed.
SeriesMicro & nano technologies.
Subjects
Nanotechnology.
Microtechnology.
Metrology.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780080964546
9781437778328
Physical Description1 online zdroj (xxvi, 321 pages) : illustrations.

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Table of Contents:
  • Introduction to metrology for micro- and nanotechnology; Some basics of measurement;€ Precision measurement instrumentation
  • some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A: SI units of measurement and their realisation at NPL; Appendix B: SI derived units.

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