Nanofabrication fundamentals and applications

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is v...

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Bibliographic Details
Other Authors: Tseng, A. A.
Format: eBook
Language: English
Published: Singapore ; Hackensack, NJ : World Scientific, c2008.
Subjects:
Nanostructured materials.
Nanostructures.
Scanning probe microscopy.
Lithography, Electron beam.
elektronické knihy
electronic books
ISBN: 9789812790897
9781613447789
9789812700766
9789812705426
9781281933591
Physical Description: 1 online zdroj (viii, 574 p.) : ill. (some col.)

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LEADER 04691cam a2200457 a 4500
001 81679
003 CZ ZlUTB
005 20240911221013.0
006 m o d
007 cr |n
008 070919s2008 si a sb 001 0 eng
020 |a 9789812790897  |q (ebook) 
020 |a 9781613447789  |q (ebook) 
020 |z 9789812700766 
020 |z 9789812705426 
020 |a 9781281933591 
035 |a (OCoLC)463076470  |z (OCoLC)262623243  |z (OCoLC)313650714  |z (OCoLC)652399071  |z (OCoLC)815752165  |z (OCoLC)879074261 
040 |a AU@  |b eng  |c AU@  |d N$T  |d YDXCP  |d OCLCQ  |d CDX  |d IDEBK  |d OCLCQ  |d LGG  |d STF  |d OCLCQ  |d B24X7  |d OCLCQ  |d KNOVL  |d DEBSZ  |d OCLCQ  |d OCLCO  |d KNOVL  |d EBLCP 
245 0 0 |a Nanofabrication  |h [elektronický zdroj] :  |b fundamentals and applications /  |c editor, Ampere A. Tseng. 
260 |a Singapore ;  |a Hackensack, NJ :  |b World Scientific,  |c c2008. 
300 |a 1 online zdroj (viii, 574 p.) :  |b ill. (some col.) 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
505 0 |a Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng ... [et al.] -- ch. 2. Atomic force microscope lithography / N. Kawasegi ... [et al.] -- ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi ... [et al.] -- ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz -- ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin -- ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias -- ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur -- ch. 8. Extreme ultraviolet lithography / H. Kinoshita -- ch. 9. Electron projection lithography / T. Miura ... [et al.] -- ch. 10. Electron beam direct writing / K. Yamazaki -- ch. 11. Electron beam induced deposition / K. Mitsuishi -- ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen -- ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi -- ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni -- ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei -- ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger. 
520 |a Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. 
590 |a Knovel Library  |b ACADEMIC - Nanotechnology 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity 
650 0 |a Nanostructured materials. 
650 0 |a Nanostructures. 
650 0 |a Scanning probe microscopy. 
650 0 |a Lithography, Electron beam. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Tseng, A. A.  |q (Ampere A.) 
776 0 8 |i Print version:  |t Nanofabrication.  |d Singapore ; Hackensack, NJ : World Scientific, 2008  |z 9789812700766  |z 9812700765  |w (DLC) 2008275080  |w (OCoLC)173721197 
856 4 0 |u https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpNFA0000K/nanofabrication__fundamentals_and_applications  |y Plný text 
992 |a BK  |c KNOVEL 
999 |c 81679  |d 81679 
993 |x NEPOSILAT  |y EIZ 

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