Developments in surface contamination and cleaning. cleanliness validation and verification Volume 7 :

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...

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Bibliographic Details
Other Authors: Kohli, Rajiv, (Editor), Mittal, K. L., (Editor), Albert, David E., (Contributor)
Format: eBook
Language: English
Published: Kidlington, England ; Waltham, Massachusetts : William Andrew, 2015.
Edition: First edition.
Subjects:
Surfaces (Technology)
Surface contamination > Prevention.
elektronické knihy
electronic books
ISBN: 9780323311458
9780323313032
Physical Description: 1 online zdroj (207 pages) : illustrations, tables.

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Table of contents

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020 |a 9780323311458  |q (ebook) 
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035 |a (OCoLC)899000184 
040 |a E7B  |b eng  |e rda  |c E7B  |d OCLCO  |d OPELS 
245 0 0 |a Developments in surface contamination and cleaning.  |n Volume 7 :  |b cleanliness validation and verification /  |c edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others]. 
250 |a First edition. 
264 1 |a Kidlington, England ;  |a Waltham, Massachusetts :  |b William Andrew,  |c 2015. 
264 4 |c ©2015 
300 |a 1 online zdroj (207 pages) :  |b illustrations, tables. 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
504 |a Includes bibliographical references at the end of each chapters and index. 
520 |a As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography. 
590 |a Knovel Library  |b ACADEMIC - Electronics & Semiconductors 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity 
650 0 |a Surfaces (Technology) 
650 0 |a Surface contamination  |x Prevention. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Kohli, Rajiv,  |e editor. 
700 1 |a Mittal, K. L.,  |e editor. 
700 1 |a Albert, David E.,  |e contributor. 
776 0 8 |i Print version:  |t Developments in surface contamination and cleaning. Volume 7.  |b First edition.  |d Kidlington, England ; Waltham, Massachusetts : William Andrew, c2015  |h xvi, 190 pages  |z 9780323313032 
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992 |a BK  |c KNOVEL 
999 |c 79062  |d 79062 
993 |x NEPOSILAT  |y EIZ 

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