Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
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| Corporate Author | |
|---|---|
| Other Authors | , , |
| Format | Electronic eBook |
| Language | English |
| Published |
Durnten-Zurich, Switzerland :
Trans Tech Publications Ltd.,
[2013]
|
| Series | Diffusion and defect data. Solid state phenomena ;
v. 195. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9783038139089 9781628700268 9783037855270 |
| ISSN | 1012-0394 ; |
| Physical Description | 1 online zdroj (328 pages) : illustrations (black and white). |
Cover
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| 111 | 2 | |a International Symposium on Ultra Clean Processing of Semiconductor Surfaces |n (11th : |d 2012 : |c Ghent, Belgium) | |
| 245 | 1 | 0 | |a Ultra clean processing of semiconductor surfaces XI : |b selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium / |c edited by Paul Mertens, Marc Meuris and Marc Heyns. |
| 246 | 1 | 3 | |a UCPSS 2012 |
| 264 | 1 | |a Durnten-Zurich, Switzerland : |b Trans Tech Publications Ltd., |c [2013] | |
| 264 | 4 | |c ©2013 | |
| 300 | |a 1 online zdroj (328 pages) : |b illustrations (black and white). | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a počítač |b c |2 rdamedia | ||
| 338 | |a online zdroj |b cr |2 rdacarrier | ||
| 490 | 1 | |a Solid state phenomena, |x 1012-0394 ; |v v. 195 | |
| 504 | |a Includes bibliographical references and index. | ||
| 590 | |a Knovel Library |b ACADEMIC - Electronics & Semiconductors | ||
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity | ||
| 650 | 0 | |a Electrical engineering |v Congresses. | |
| 650 | 0 | |a Semiconductors |x Surfaces |v Congresses. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Heyns, Marc. | |
| 700 | 1 | |a Mertens, Paul. | |
| 700 | 1 | |a Meuris, Marc. | |
| 776 | 0 | 8 | |i Print version: |t Ultra clean processing of semiconductor surfaces XI. |d Durnten-Zurich, Switzerland ; Trans Tech Publications, [2013] |h xiv, 332 pages : illustrations (black and white) ; 24 cm. |k Diffusion and defect data. Pt. B, Solid state phenomena ; v. 195. |z 9783037855270 |z 3037855274 |w (DLC) 2012538789 |
| 830 | 0 | |a Diffusion and defect data. |n Pt. B, |p Solid state phenomena ; |v v. 195. | |
| 856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpUCPSSXI2/ultra_clean_processing_of_semiconductor_surfaces_xi |
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