Microelectronics failure analysis desk reference
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| Corporate Authors | , |
|---|---|
| Other Authors | |
| Format | eBook |
| Language | English |
| Published |
Materials Park, Ohio :
ASM International,
c2011.
|
| Edition | 6th ed. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781613447598 9781615037261 9781615037254 |
| Physical Description | 1 online zdroj (xi, 660 p.) : ill. |
Table of Contents:
- Section 1. Introduction
- section 2. Failure analysis process overviews
- section 3. Failure analysis topics
- section 4. Fault verification and classification
- section 5. Localization techniques
- section 6. Deprocessing and sample preparation
- section 7. Inspection
- section 8. Materials analysis
- section 9. Focused ion beam applications
- section 10. Management and reference information.