Fabrication engineering at the micro and nanoscale

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Bibliographic Details
Main Author: Campbell, Stephen A., 1954-
Format: eBook
Language: English
Published: New York : Oxford University Press, 2008.
Edition: 3rd ed.
Series: Oxford series in electrical and computer engineering.
Subjects:
Semiconductors > Design and construction.
Semiconductors > Mathematical models.
elektronické knihy
electronic books
ISBN: 9781613441107
9780195320176
Physical Description: 1 online zdroj (xiv, 647 p.) : ill.

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Table of contents

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020 |a 9781613441107  |q (ebook) 
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035 |a (OCoLC)743217551  |z (OCoLC)748339450 
040 |a KNOVL  |b eng  |c KNOVL  |d OCLCQ  |d DEBSZ  |d OCLCQ  |d KNOVL  |d ZCU  |d KNOVL  |d OCLCF  |d OCLCO  |d COO  |d KNOVL 
100 1 |a Campbell, Stephen A.,  |d 1954- 
245 1 0 |a Fabrication engineering at the micro and nanoscale  |h [elektronický zdroj] /  |c Stephen A. Campbell. 
250 |a 3rd ed. 
260 |a New York :  |b Oxford University Press,  |c 2008. 
300 |a 1 online zdroj (xiv, 647 p.) :  |b ill. 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
490 1 |a The Oxford series in electrical and computer engineering 
500 |a Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed. 
504 |a Includes bibliographical references and index. 
505 0 |a An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing. 
590 |a Knovel Library  |b ACADEMIC - Electronics & Semiconductors 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity 
650 0 |a Semiconductors  |x Design and construction. 
650 0 |a Semiconductors  |x Mathematical models. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Campbell, Stephen A.,  |d 1954-  |t Science and engineering of microelectronic fabrication. 
776 0 8 |i Print version:  |a Campbell, Stephen A., 1954-  |t Fabrication engineering at the micro and nanoscale.  |b 3rd ed.  |d New York : Oxford University Press, 2008  |z 0195320174  |w (DLC) 2007013450  |w (OCoLC)122338108 
830 0 |a Oxford series in electrical and computer engineering. 
856 4 0 |u https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpFEMNE001/fabrication_engineering_at_the_micro_and_nanoscale_3rd_edition  |y Plný text 
992 |a BK  |c KNOVEL 
999 |c 78990  |d 78990 
993 |x NEPOSILAT  |y EIZ 

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