Fabrication engineering at the micro and nanoscale

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Bibliographic Details
Main Author Campbell, Stephen A., 1954-
Format Electronic eBook
LanguageEnglish
Published New York : Oxford University Press, 2008.
Edition3rd ed.
SeriesOxford series in electrical and computer engineering.
Subjects
Semiconductors > Design and construction.
Semiconductors > Mathematical models.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781613441107
9780195320176
Physical Description1 online zdroj (xiv, 647 p.) : ill.

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More Information
Item Description:Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
Bibliography:Includes bibliographical references and index.
ISBN:9781613441107
9780195320176
Access:Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity
Physical Description:1 online zdroj (xiv, 647 p.) : ill.

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