Fabrication engineering at the micro and nanoscale

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Bibliographic Details
Main Author: Campbell, Stephen A., 1954-
Format: eBook
Language: English
Published: New York : Oxford University Press, 2008.
Edition: 3rd ed.
Series: Oxford series in electrical and computer engineering.
Subjects:
Semiconductors > Design and construction.
Semiconductors > Mathematical models.
elektronické knihy
electronic books
ISBN: 9781613441107
9780195320176
Physical Description: 1 online zdroj (xiv, 647 p.) : ill.

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Description
Item Description: Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
Bibliography: Includes bibliographical references and index.
ISBN: 9781613441107
9780195320176
Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity

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