Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...

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Bibliographic Details
Main Author Bao, Min-Hang
Format Electronic eBook
LanguageEnglish
Published Amsterdam ; New York : Elsevier, 2000.
SeriesHandbook of sensors and actuators ; v. 8.
Subjects
Transducers > Handbooks, manuals, etc.
Microelectromechanical systems > Handbooks, manuals, etc.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780444505583
9780080524030
Physical Description1 online zdroj (xiv, 378 pages) : illustrations : digital, HTML and PDF files.

Cover

Table of Contents:
  • Preface. Chapter 1
  • Introduction to micro mechanical transducers. Chapter 2
  • Basic mechanics of beam and diaphragm structures. Chapter 3
  • Air damping. Chapter 4
  • Electrostatic driving and capacitive sensing. Chapter 5
  • Piezoresistive sensing. Chapter 6
  • Piezoresistive pressure transducers. Chapter 7
  • Piezoresistive accelerometers. Chapter 8
  • Capacitive pressure transducers and accelerometers. Chapter 9
  • Resonant sensors and vibratory gyroscopes. Subject Index.

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