Micro mechanical systems principles and technology

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...

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Bibliographic Details
Other Authors: Fukuda, T. 1948-, Menz, W.
Format: eBook
Language: English
Published: Amsterdam ; New York : Elsevier, 1998.
Series: Handbook of sensors and actuators ; v. 6.
Subjects:
Microelectromechanical systems > Handbooks, manuals, etc.
elektronické knihy
electronic books
ISBN: 9780080536545
9780444823632
9781282284975
Physical Description: 1 online zdroj (viii, 268 pages) : illustrations.

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Table of contents

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020 |a 9780080536545  |q (ebook) 
020 |a 9780444823632 
020 |a 9781282284975 
035 |a (OCoLC)183633551  |z (OCoLC)162588685  |z (OCoLC)646827621  |z (OCoLC)742295047  |z (OCoLC)816324350  |z (OCoLC)823121326 
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245 0 0 |a Micro mechanical systems  |h [elektronický zdroj] :  |b principles and technology /  |c edited by T. Fukuda and W. Menz. 
260 |a Amsterdam ;  |a New York :  |b Elsevier,  |c 1998. 
300 |a 1 online zdroj (viii, 268 pages) :  |b illustrations. 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
490 1 |a Handbook of sensors and actuators ;  |v v. 6 
504 |a Includes bibliographical references. 
520 |a In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. 
590 |a Knovel Library  |b ACADEMIC - Electronics & Semiconductors 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity 
650 0 |a Microelectromechanical systems  |v Handbooks, manuals, etc. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Fukuda, T.  |q (Toshio),  |d 1948- 
700 1 |a Menz, W.  |q (Wolfgang) 
776 0 8 |i Print version:  |t Micro mechanical systems.  |d Amsterdam ; New York : Elsevier, 1998  |z 9780444823632  |w (DLC) 98020529  |w (OCoLC)39122892 
830 0 |a Handbook of sensors and actuators ;  |v v. 6. 
856 4 0 |u https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpMMSPT001/micro_mechanical_systems__principles_and_technology  |y Plný text 
992 |a BK  |c KNOVEL 
999 |c 78896  |d 78896 
993 |x NEPOSILAT  |y EIZ 

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