Thin film materials technology sputtering of compound materials

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

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Bibliographic Details
Main Author Wasa, Kiyotaka
Other Authors Kitabatake, Makoto, Adachi, Hideaki
Format Electronic eBook
LanguageEnglish
Published Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, ©2004.
Subjects
Cathode sputtering (Plating process)
Thin films.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780815514831
9783540211181
9780815519317
Physical Description1 online zdroj (xiv, 518 pages) : illustrations

Cover

Table of Contents:
  • Thin Film Materials and Devices
  • Thin Film Process
  • Sputtering Phenomena
  • Sputtering Systems
  • Deposition of Compound Thin Films
  • Structural Control of Compound Thin Films
  • Microfabrication by Sputtering
  • Appendices
  • Index.

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