Thin film materials technology sputtering of compound materials
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...
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| Main Author | |
|---|---|
| Other Authors | , |
| Format | Electronic eBook |
| Language | English |
| Published |
Norwich, NY : Heidelberg :
William Andrew Pub. ; Springer,
©2004.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9780815514831 9783540211181 9780815519317 |
| Physical Description | 1 online zdroj (xiv, 518 pages) : illustrations |
Cover
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| 100 | 1 | |a Wasa, Kiyotaka. | |
| 245 | 1 | 0 | |a Thin film materials technology |h [elektronický zdroj] : |b sputtering of compound materials / |c by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. |
| 260 | |a Norwich, NY : |b William Andrew Pub. ; |a Heidelberg : |b Springer, |c ©2004. | ||
| 300 | |a 1 online zdroj (xiv, 518 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a počítač |b c |2 rdamedia | ||
| 338 | |a online zdroj |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a Thin Film Materials and Devices -- Thin Film Process -- Sputtering Phenomena -- Sputtering Systems -- Deposition of Compound Thin Films -- Structural Control of Compound Thin Films -- Microfabrication by Sputtering -- Appendices -- Index. | |
| 520 | |a An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. | ||
| 590 | |a Knovel Library |b ACADEMIC - Electronics & Semiconductors | ||
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity | ||
| 650 | 0 | |a Cathode sputtering (Plating process) | |
| 650 | 0 | |a Thin films. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Kitabatake, Makoto. | |
| 700 | 1 | |a Adachi, Hideaki. | |
| 776 | 0 | 8 | |i Print version: |a Wasa, Kiyotaka. |t Thin film materials technology. |d Norwich, NY : William Andrew Pub. ; Heidelberg : Springer, ©2004 |z 0815514832 |w (DLC) 2003018016 |w (OCoLC)52886812 |
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