Thin film materials technology sputtering of compound materials
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...
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| Other Authors | , |
| Format | Electronic eBook |
| Language | English |
| Published |
Norwich, NY : Heidelberg :
William Andrew Pub. ; Springer,
©2004.
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| Subjects | |
| Online Access | Full text |
| ISBN | 9780815514831 9783540211181 9780815519317 |
| Physical Description | 1 online zdroj (xiv, 518 pages) : illustrations |
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| Summary: | An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780815514831 9783540211181 9780815519317 |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity |
| Physical Description: | 1 online zdroj (xiv, 518 pages) : illustrations |