Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI)

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.

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Bibliographic Details
Other Authors McGuire, G. E.
Format Electronic eBook
LanguageEnglish
Published Park Ridge, N.J. : Noyes Publicatons, c1988.
SeriesMaterials science and process technology series.
Subjects
Online AccessFull text
ISBN9781591242529
9780815518969
9780815511502
Physical Description1 online zdroj (xiii, 675 p.) : ill.

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Summary:A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.
Bibliography:Includes bibliographical references and index.
ISBN:9781591242529
9780815518969
9780815511502
Access:Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity
Physical Description:1 online zdroj (xiii, 675 p.) : ill.