Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI)
A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J. :
Noyes Publicatons,
c1988.
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| Series | Materials science and process technology series.
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| Subjects | |
| Online Access | Full text |
| ISBN | 9781591242529 9780815518969 9780815511502 |
| Physical Description | 1 online zdroj (xiii, 675 p.) : ill. |
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| Summary: | A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781591242529 9780815518969 9780815511502 |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity |
| Physical Description: | 1 online zdroj (xiii, 675 p.) : ill. |