Handbook of compound semiconductors growth, processing, characterization, and devices

This book reviews the advances and technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides an overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such...

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Bibliographic Details
Other Authors Holloway, Paul H., McGuire, G. E.
Format Electronic eBook
LanguageEnglish
Published Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995.
SeriesMaterials science and process technology series. Electronic materials and process technology.
Subjects
Compound semiconductors > Handbooks, manuals, etc.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781591240808
9780815513742
9780815517436
9780080946146
Physical Description1 online zdroj (xxii, 914 pages) : illustrations.

Cover

Table of Contents:
  • Bulk Crystal Growth
  • MOCVD of Compound Semiconductor Layers
  • Molecular Beam Epitaxy
  • Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials
  • Surface Processing of III-V Semiconductors
  • Ion Implantation Induced Extended Defects in GaAs
  • Passivation of GaAs and InP
  • Wet and Dry Etching of Compound Semiconductors
  • Rapid Isothermal Processing (RIP)
  • Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices
  • Packaging
  • Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques
  • Characterization of Compound Semiconductor Material by Ion Beams
  • Optical Characterization of Compound Semiconductors
  • Gallium Arsenide Microelectronic Devices and Circuits
  • Optoelectronic Devices
  • Acknowledgments
  • References
  • Index.

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