Reliability of MEMS : testing of materials and devices
Saved in:
Other Authors: | , |
---|---|
Format: | Book |
Language: | English |
Published: |
Weinheim :
Wiley-VCH,
[2013]
|
Edition: | [New edition] |
Series: | Advanced micro & nanosystems
|
Subjects: | |
ISBN: | 9783527335015 978-3-527-67503-6 |
Physical Description: | xx, 303 stran : černobílé ilustrace ; 25 cm |
LEADER | 01963nam a2200517 i 4500 | ||
---|---|---|---|
001 | 77669 | ||
003 | CZ ZlUTB | ||
005 | 20240829154723.0 | ||
007 | ta | ||
008 | 150515t20132013gw a 001 0 eng d | ||
020 | |a 9783527335015 |q (brožováno) | ||
020 | |z 978-3-527-67503-6 |q (ePDF) | ||
040 | |a ZLD002 |b cze |e rda | ||
072 | 7 | |a 621.38 |x Elektronika |2 Konspekt |9 19 | |
080 | |a 621.38.049.77-022.53 |2 MRF | ||
080 | |a 62-027.45 |2 MRF | ||
080 | |a 621.38:005.935.33 |2 MRF | ||
080 | |a 620.1 |2 MRF | ||
080 | |a (082) |2 MRF | ||
245 | 0 | 0 | |a Reliability of MEMS : |b testing of materials and devices / |c edited by Osamu Tabata, Toshiyuki Tsuchiya |
250 | |a [New edition] | ||
264 | 1 | |a Weinheim : |b Wiley-VCH, |c [2013] | |
264 | 4 | |c ©2013 | |
300 | |a xx, 303 stran : |b černobílé ilustrace ; |c 25 cm | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a bez média |b n |2 rdamedia | ||
338 | |a svazek |b nc |2 rdacarrier | ||
490 | 1 | |a Advanced micro & nanosystems | |
504 | |a Obsahuje bibliografické odkazy a rejstřík | ||
650 | 0 | 7 | |a mikroelektromechanické systémy |7 ph602137 |2 czenas |
650 | 0 | 7 | |a spolehlivost (technika) |7 ph125917 |2 czenas |
650 | 0 | 7 | |a testování elektronických systémů |7 ph330269 |2 czenas |
650 | 0 | 7 | |a zkoušení materiálů |7 ph116776 |2 czenas |
650 | 0 | 9 | |a microelectromechanical systems |2 eczenas |
650 | 0 | 9 | |a reliability (engineering) |2 eczenas |
650 | 0 | 9 | |a testing of electronic systems |2 eczenas |
650 | 0 | 9 | |a material testing |2 eczenas |
655 | 7 | |a sborníky |7 fd163935 |2 czenas | |
655 | 9 | |a papers of several authors |2 eczenas | |
700 | 1 | |a Tabata, Osamu, |d 1956- |7 stk2009477323 |4 edt | |
700 | 1 | |a Tsuchiya, Toshiyuki |7 stk2009477322 |4 edt | |
830 | 0 | |a Advanced micro & nanosystems | |
910 | |a ZLD002 | ||
992 | |a BK |b SK | ||
999 | |c 77669 |d 77669 | ||
952 | |0 0 |1 0 |4 0 |6 62138RELIABILITY |7 0 |8 BOOK |9 133470 |a UTBZL |b UTBZL |c 005 |d 2015-05-15 |o 621.38/RELIABILITY |p 420010159305 |r 2019-08-26 |v 1923.00 |w 2019-08-26 |x N:nákup; |y 01 |