Reliability of MEMS : testing of materials and devices

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Bibliographic Details
Other Authors Tabata, Osamu, 1956- (Editor), Tsuchiya, Toshiyuki (Editor)
Format Book
LanguageEnglish
Published Weinheim : Wiley-VCH, [2013]
Edition[New edition]
SeriesAdvanced micro & nanosystems
Subjects
ISBN9783527335015
978-3-527-67503-6
Physical Descriptionxx, 303 stran : černobílé ilustrace ; 25 cm

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ISBN:9783527335015
978-3-527-67503-6
Physical Description:xx, 303 stran : černobílé ilustrace ; 25 cm