Reliability of MEMS : testing of materials and devices

• Other Authors: Tabata, Osamu, 1956- (Editor), Tsuchiya, Toshiyuki (Editor)
• Format: Book
• Language: English
• Published: Weinheim : Wiley-VCH, [2013]
• Edition: [New edition]
• Series: Advanced micro & nanosystems
• Subjects: mikroelektromechanické systémy; spolehlivost (technika); testování elektronických systémů; zkoušení materiálů; microelectromechanical systems; reliability (engineering); testing of electronic systems; material testing; sborníky; papers of several authors
• ISBN: 9783527335015; 978-3-527-67503-6
• Physical Description: xx, 303 stran : černobílé ilustrace ; 25 cm