Reliability of MEMS : testing of materials and devices
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| Other Authors | , |
|---|---|
| Format | Book |
| Language | English |
| Published |
Weinheim :
Wiley-VCH,
[2013]
|
| Edition | [New edition] |
| Series | Advanced micro & nanosystems
|
| Subjects | |
| ISBN | 9783527335015 978-3-527-67503-6 |
| Physical Description | xx, 303 stran : černobílé ilustrace ; 25 cm |
Cover
| Bibliography: | Obsahuje bibliografické odkazy a rejstřík |
|---|---|
| ISBN: | 9783527335015 978-3-527-67503-6 |
| Physical Description: | xx, 303 stran : černobílé ilustrace ; 25 cm |