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|a 621.3.08
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|a 621.31
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|a Handbook of silicon semiconductor metrology /
|c edited by Alain C. Diebold
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260 |
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|a New York :
|b Marcel Dekker,
|c c2001
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300 |
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|a xvi, 874 s. :
|b il.
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|a MĚŘENÍ
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|a Diebold, Alain
|4 edt
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|a ZLD002
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|d 2006-07-29
|o 621.31/HANDBOOK
|p 420010082791
|r 2019-08-25
|v 7173.00
|w 2019-08-25
|x změnit signaturu
|x N:nákup
|y 08
|