Handbook of silicon semiconductor metrology

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Bibliographic Details
Other Authors	Diebold, Alain (Editor)
Format	Book
Language	English
Published	New York : Marcel Dekker, c2001
Subjects	MĚŘENÍ polovodiče
ISBN	0824705068
Physical Description	xvi, 874 s. : il.

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ISBN:	0824705068
Physical Description:	xvi, 874 s. : il.