Plasma nanoscience basic concepts and applications of deterministic nanofabrication
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Main Author: | |
---|---|
Format: | eBook |
Language: | English |
Published: |
Weinheim :
Wiley-VCH,
c2008
|
Subjects: | |
ISBN: | 3527407405 978-3-527-62332-7 978-3-527-40740-8 |
Physical Description: | xxv, 538 s. : il. |
LEADER | 01728nam a2200469 a 4500 | ||
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