Low temperature plasma physics : fundamental aspects and applications

• Other Authors: Hippler, Rainer (Editor)
• Format: Book
• Language: English
• Published: Berlin : Wiley-VCH, 2001
• Edition: 1st ed.
• Subjects: Fyzika; mikroelektronika; plazma (fyzika); POLYMERY; POVRCHOVÁ ÚPRAVA; povrchové jevy; sborníky
• ISBN: 3527288872
• Physical Description: 523 s. : il.