Piezoresistive Effect of p-Type Single Crystalline 3C-SiC : Silicon Carbide Mechanical Sensors for Harsh Environments

This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline S...

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Bibliographic Details
Main Author Phan, Hoang-Phuong (Author)
Corporate Author SpringerLink (Online service)
Format Electronic eBook
LanguageEnglish
Published Cham : Springer International Publishing : Imprint: Springer, 2017.
SeriesSpringer Theses, Recognizing Outstanding Ph.D. Research,
Subjects
Online AccessFull text
ISBN9783319555447
ISSN2190-5053
DOI10.1007/978-3-319-55544-7
Physical Description1 online resource (XXI, 146 p. 94 illus., 3 illus. in color.)

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Table of Contents:
  • Introduction and Literature Review
  • Theory of the Piezoresistive Effect in p-type 3C-Sic
  • 3C-Sic Film Growth and Sample Preparation
  • Characterization of the Piezoresistive Effect in p-type Single Crystalline 3C-Sic
  • The Piezoresistive Effect in p-type Nanocrystalline Sic
  • The Piezoresistive Effect of Top Down p-type 3C-Sic Nanowires
  • Conclusion and Future Work.