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Tsai, Julius M.
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NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1...
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2011
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NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July...
Year of Publication
2011
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Electronic
eBook
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Related Subjects
Microelectromechanical systems
Nanoelectromechanical systems
