Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
Year of Publication 1990
Full text
Book
Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis
Year of Publication 1989
Full text
Electronic
eBook
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Year of Publication 1990
Full text
Electronic
eBook