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Author
Esashi, Masayoshi, 1949-
Masayoshi Esashi
is an
engineer
. He is a global authority of
Microelectromechanical systems
and serves as the
professor
of the
Tohoku University
graduate school engineering graduate course.
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3D and circuit integration of MEMS
by
Esashi, Masayoshi, 1949
-
Year of Publication
2021
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Related Subjects
integrated circuits
integrované obvody
křemík
microelectromechanical systems
mikroelektromechanické systémy
silicon